ADDI-DATA logo
E-mail info@addi-data.com | +49 7229 18470 | Login
flag_germany flag_france_web flag_india_web flag_usa_web flag_china_web
24
NOV
2015

Monitoring of wafer production machines

Posted By :
Comments : 0

Machine data transfer via Ethernet to a Maestria® data bank for statistical purposes

Monitoring of wafer production machines

Monitoring of wafer production machines

Challenge

In order to achieve the best quality of wafers with regard to purity, roughness and flatness and to reduce rejects, data is to be acquired from each machine and then transferred through Modbus TCP/IP to a central data bank were it is to be stored for statistical purposes.

Solution

In a wafer production facility with more than 500 machines, 20 measurement points per machine are set up. Measurement data like temperature and pressure are to be acquired. The sensors are connected directly to the measurement systems. Two Ethernet systems acquire the sensor data: the analog input system MSX-E3011 and the system for serial interfaces MSX-E7511. Subsequently, the measurement data is transferred through Modbus TCP/IP to a Maestria® data bank.

Product page MSX-E3011

Product page MSX-E7511